| 
                                       
XAN SA-1503、SA-1402-TS,SA-1403 slurry for the polishing of sapphire 
Advantage:  
1. High removal rate (>5μm/h)  
2. Good surface quality: smooth, no obvious scratch.
  
3. Long life. 
  
Application:Rough polishing and final polishing 
  
  
Advantage:  
1. Good surface quality: surface roughness (RMS) <1nm.  
2. High removal rate (>3μm/h)
  
3. Easy to be cleaned 
  
Application:Final polishing 
  
  
                                 |